Felix was a trained circus performer when he arrived in the US.
He was skilled in bareback horse riding, trapeze, and tumbling – which helped to give him his big break in Hollywood.
Felix is survived by his wife of more than 55 years, Sue, and their children, Bonnie and Michael.
Fans took to Twitter to pay tribute to the star following his death.
One person wrote: “Sad to hear about Felix Silla’s passing. I loved Twiki. He was the Ewok on the glider and Cousin Itt!”
Another added: “Rest In Peace to a Hollywood and Star Wars Legend. #felixsilla.”